Trieu HK, Rennpferdt L, Bohne S. 3D patterning – an extended toolbox for micro-electro-mechanical systems. Trans. AMMM [Internet]. 2023 Mar. 16 [cited 2026 Apr. 2];4(1):701. Available from: https://www.abstracts.suchtkongress.org/index.php/ammm/article/view/701